High-Accuracy, High-Speed
(AOI) Automated Optical Inspection Systems

For automated defect detection and high-accuracy measurements

VisionGauge^® Online High-Speed AOI systems are perfect solutions for demanding high-throughput, high-resolution applications.

These systems are perfect for a wide range of applications including MicroElectroMechanical systems (for MEMS inspection or MEMS measurement), semiconductor & discrete device inspection and measurement.

These are multi-processor based automated inspection systems that support concurrent image analysis and stage motion.

• Complete, fully-contained, self-standing unit.

• Full gantry configuration (i.e. the camera moves over the parts; the parts themselves do not move).

• Available with high-speed 240 VAC servomotor motion system.

• Available in a wide range of travels, short and long.

• Available with application-specific camera / optics / illumination module.

• Available with a resolution as fine as 0.1 micron.

• Optional LASER module for laser profiling is also available.

• Easy to use, easy to program, fully automated inspection system. 

• Inspection and measurement programs (i.e. "recipes") are easily created and modified using intuitive Graphical User Interface. Programs can be saved to disk and read-in later on.

• These systems have a wide range of tools for:

See sample video clips of the system in action ("*.wmv" format):

Low resolution:

Head-on view (3.4 Mb)
Oblique view (2.2 Mb)

High resolution:

Head-on view (10.2 Mb)
Oblique view (6.1 Mb)

Download a "pdf" file with more information:

VisionGauge^® High-Speed High-Accuracy (AOI) Automated Optical Inspection Systems "pdf" file